Basic Info.
Model NO.
MH
Condition
New
Certification
CE
Warranty
12 Months
Automatic Grade
Automatic
Installation
Vertical
Driven Type
Electric
Mould Life
>1,000,000 Shots
Transport Package
Wooden Case
Trademark
MH
Origin
China
Production Capacity
1000
Product Description
Wafer 2D&3D Inspection System
Introduction to Main Modules
EFEM:
1. Manually load 12-inch FOUPs or 8-inch cassettes onto the loading position
2. Dual-arm design to reduce waiting time for changing wafers.
3. Compatible with 8-inch and 12-inch product alignment, and can also be customized for 6-inch wafers.
STAGE:
1. Flying capture for image acquisition and inspection.
2. Able to detect 3D information such as Bump height and coplanarity.
3. Achieves sub-micron precision.
4. Calculation results are available immediately after scanning
Software Introduction
1.Supports multi-level permissions and permission operation log functions
2.The equipment menu bar covers a wide range of functions
3.Automatically generates mapping and production reports
4.Displays task status in real-time.
5.Combines traditional algorithms with Al for fast and accurate defect
identification.
Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment.
The company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment.
Frequently Asked Questions
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.
2. About Sample:
We can provide sample production services for you, but you may provide some fees.
3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.
4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.
5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.
6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.
| Project | Content |
| Product Type | 6",8",12" wafer, 2.5D/3D packaging |
| 2D Inspection Items | Foreign objects, residual glue, particles, scratches, cracks, contamination, CP deviation, excessive needle marks, etc. |
| 2D Metrology | Bump diameter, needle mark coordinates, RDL and TSV metrology, etc. |
| 3D Inspection Project | Bump height, Bump coplanality |
| Cassette &Transmission Method | 8"SMIF , 12" FOUP or combination |
| Lens and Resolution | 2x(2.75um)13.5x(1.57um)5x(1.1um)17.5x(0.73um)110x(0.55um) |
| Precision | 0.55um/pixel |
| Optional and Customized | Double sided OCR,3D module, supported by E84 |
Introduction to Main Modules
EFEM:
1. Manually load 12-inch FOUPs or 8-inch cassettes onto the loading position
2. Dual-arm design to reduce waiting time for changing wafers.
3. Compatible with 8-inch and 12-inch product alignment, and can also be customized for 6-inch wafers.
STAGE:
1. Flying capture for image acquisition and inspection.
2. Able to detect 3D information such as Bump height and coplanarity.
3. Achieves sub-micron precision.
4. Calculation results are available immediately after scanning
Software Introduction
1.Supports multi-level permissions and permission operation log functions
2.The equipment menu bar covers a wide range of functions
3.Automatically generates mapping and production reports
4.Displays task status in real-time.
5.Combines traditional algorithms with Al for fast and accurate defect
identification.
Minder-Hightech is sales and service representative in semiconductor and electronic product industry equipment.
The company is committed to providing customers with Superior, Reliable, and One-Stop Solutions for machinary equipment.
Frequently Asked Questions
1. About Price:
All of our prices are competitive and negotiable. The price varies depending on the configuration and customization complexity of your device.
2. About Sample:
We can provide sample production services for you, but you may provide some fees.
3. About Payment:
After the plan is confirmed, you need to pay us a deposit first, and the factory will start preparing the goods. After the equipment is ready and you pay the balance, we will ship it.
4. About Delivery:
After the equipment manufacturing is completed, we will send you the acceptance video, and you can also come to the site to inspect the equipment.
5. Installation and Debugging:
After the equipment arrives at your factory, we can dispatch engineers to install and debug the equipment. We will provide you with a separate quotation for this service fee.
6. About Warranty:
Our equipment has a 12-month warranty period. After the warranty period, if any parts are damaged and need to be replaced, we will only charge the cost price.